Ion Nitriding Using Pulsed D.C Glow Discharge Combined with Inductively Coupled Plasma

Dust particle charging in DC glow discharge plasma

Dust particles charging in a stratified positive column of a low-pressure DC glow discharge was investigated theoretically. The presented model consists of (i) previously developed 1D selfconsistent model for discharge parameters on the tube axis; (ii) ambipolar approximation for radial electric potential distribution and the assumption that the electron energy distribution function in radial d...

Bulk plasma properties in the pulsed glow discharge

This work focuses on the spatial and temporal characteristics of a glow discharge plasma operated with power pulses of 5 ms in duration at 25% duty cycle. Interpretation of emission data provides insight into the nature of the plasma at each instant of a typical pulse cycle and at each position in space. Because the bulk plasma properties affect the distribution of excited energy levels of the ...

Characteristics of pulsed dual frequency inductively coupled plasma

Double Langmuir probe measurement of plasma parameters in a dc glow discharge

In this paper, plasma main characteristics such as electron mean temperature, electron number density, and oscillation frequency have been measured experimentally using the double Langmuir probe diagnostic system. In our experiment, the plasma was generated by applying the low pressure dc glow discharge in several common gases. The experimental results indicated the highest plasma density and o...

COMPARISON OF PROPERTIES OF TiN/TiCN AND PLASMA NITRIDING/TiCN FILMS DEPOSITED ON THE TOOL STEEL BY PULSED DC- PACVD

In this work, TiN/TiCN & PN/TiCN multilayer films were deposited by plasma- assisted chemical vapour deposition (PACVD). Plasma nitriding (PN) and TiN intermediate layer prior to coating leads to appropriate hardness gradient and it can greatly improve the mechanical properties of the coating. The composition, crystalline structure and phase of the films were investigated by X-ray d...